A closed-loop digital pressure transducer is described which employs a quartz sensor embedded into a sigma delta modulator. Limit cycle analysis and test results are included for this nonlinear discrete-data system.
Boser, B.E., and Wooley, B.A.1988. 'The design of sigma-delta modulation analog-to-digital converters' IEEE J of Solid-StateCircuits, 23 (6), 1298-1308.
4.
Candy, J.C.1986. 'Decimation for Sigma Delta Modulation', IEEE Trans On Communications, Com-34 (1), 72-76.
5.
Gelb, A., and Vander Velde, W.1969. Multiple input describing functions, McGraw-Hill.
Lewis, C.P., and Hesketh, T.G.1991. 'A laboratory sigma-delta modulator', Trans Inst MC, 13 (2), 64-67.
8.
Lu, C., Lemkin, M., and Boser, B.1995. 'A monolithic surface micromachined accelerometer with digital output', IEEE J Solid-State Circuits, 30 (12), 1367-1373.
9.
Norsworthy, S. R., Schreier, R., and Temes, G. C. (Eds). 1997. Delta-sigma data converters, IEEE Press .
10.
Wuestling, S., Fromheim, O., Gemmeke, H., Tschuch, M., and Wollersheim, O.1997. 'Planar-assembly triaxial microaccelerometer with electromechanical sigma-delta ADCs', Sensors and Actuators , A61, 440-436.
11.
Yun, W., Howe, R.T., and Gray, P.1992. 'Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry', IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, USA, 126-131.