Restricted accessResearch articleFirst published online 2026-2
Influence of precursor nature on the structural,optical,and electrical properties of Indium Oxide (In 2 O 3 ) thin films synthesis by ultrasonic spray technique
This study examines the influence of different indium precursors nature on the physical properties of In2O3 thin films deposited on glass substrates via the ultrasonic spray technique. Indium chloride (InCl3), indium acetate (In(CH3COO)3), and indium nitrate (In(NO3)3) were employed as precursors for preparing the starting solution. The resulting films were analyzed using X-ray diffraction (XRD), scanning electron microscopy (SEM), UV-visible spectroscopy, Fourier-transform infrared (FTIR) spectroscopy, and electrical resistivity measurements. XRD results confirmed a polycrystalline cubic structure in all films. The crystallite sizes determined for films derived from InCl3, In(CH3COO)3, and In(NO3)3 were 53.26 nm, 39.53 nm, and 12.77 nm, respectively. SEM revealed a smooth and uniform surface morphology for all films. Optical characterization indicated that the In2O3 films synthesized using indium chloride exhibited the highest transmittance, reaching 82% in the visible spectrum. The optical band gap values were determined as 3.62 eV, 3.57 eV, and 3.47 eV for films synthesized using InCl3, In(CH3COO)3, and In(NO3)3, respectively. Photoluminescence spectroscopy revealed three primary emission peaks, with variations in intensity depending on the precursor used. FTIR analysis confirmed the presence of characteristic In–O vibrational modes, further validating the successful formation of In2O3. Electrical resistivity measurements demonstrated that the precursor type significantly influenced the conductivity of the In2O3 films, with those synthesized from indium chloride exhibiting the highest figure of merit.
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