Abstract
Keywords
Introduction
Aerostatic bearings have the advantages of low friction, high speed, low heating, and high precision.
1
The gas supply pressure of aerostatic bearings is generally low, usually between 0.4 and 0.6 MPa,
2
and their load capacity and stiffness are also low. They are generally used in light load and precision situations, which limits their application fields.
3
However, with the development of science and technology and the continuous improvement in production requirements, the demand for high-loading and high-precision aerostatic bearings is increasingly urgent. Since an aerostatic bearing is a kind of gas bearing with an external pressure supply, increasing the gas supply pressure is an effective method to improve the load capacity. However, in practice, taking the widely used orifice-compensated aerostatic bearing as an example, when the gas supply pressure increases, the flow velocity of high-pressure gas accelerates after entering the gas film, reaching supersonic status, resulting in a sharp drop in gas pressure inside the film and even a negative pressure phenomenon, thus reducing the load capacity and stiffness.4–7 From a theoretical point of view, when the gas supply pressure is high, the gas flow velocity is accelerated, and the influence of inertia force cannot be ignored.
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Studies have proven that the traditional Reynolds equation used to solve the gas film pressure distribution is no longer applicable at this time,
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and the governing equation needs to be re-established to solve. In Hasegawa and Izuchi,
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the inertial effect of gas is considered, and the flow is assumed to be a stable two-dimensional flow. Under the condition of an aerostatic bearing with a parallel surface, the approximate solution of the N−S equation of the positive pressure relation of compressible viscous fluid is solved. Classic fluid lubrication theory assumes that the flow state is laminar. Jean et al.
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puts forward the theory of nonlaminar lubrication considering the influence of inertia force in turbulent flow and gives the working characteristics of bearings in a turbulent flow state. In recent years, through the combination of the turbulence model and computer simulation methods, researchers have accurately solved the gas film flow field of aerostatic thrust bearings and ball bearings under a high gas supply pressure and a supersonic state. In Sun et al.,11,12 the shear stress transport (SST)
Orifice-compensated aerostatic bearings are widely used in engineering, and their load capacity and stiffness can be improved by increasing the number and row of orifices. 15 However, the consequent problem is that the gas consumption of bearings increases and energy consumption intensifies; moreover, when the row and number of orifices increase to a certain extent, the improvement of bearing performance is not very significant. For this reason, researchers put forward a structural optimization method of setting pressure-equalizing grooves in aerostatic bearings.16–18 By analyzing the influence of different shapes and geometric parameters of pressure-equalizing grooves on load capacity, it is found that the pressure-equalizing groove structure can suppress the attenuation of gas film pressure far away from the orifices and alleviate the phenomenon of high-pressure gas congestion and redundancy in the chamber, which can significantly improve the load capacity of aerostatic bearings. According to Du et al.,19,20 pressure-equalizing grooves are set up in the inner wall of aerostatic journal bearings, which are connected with gas supply holes. The influence of length, depth, quantity and location of pressure-equalizing grooves on load capacity and stiffness is studied. It is found that the circumferential pressure-equalizing groove has a great influence on the bearing performance of the aerostatic journal bearing, but the axial pressure-equalizing groove is more conducive to improving the load capacity. Even if only one or two axial grooves are set on the inner wall of the bearing, the effect is still prominent. In Zhao et al.,21,22 a deforming elastic pressure-equalizing groove structure is adopted to improve the orifice-compensated aerostatic thrust bearing and floating slide channel, which proves the feasibility and superiority of this structure. However, this deforming elastic pressure-equalizing groove technology has a high material requirement, which limits its application. In Yan and Zhang, 23 a variety of pressure-equalizing groove schemes are set up on the aerostatic guide. By optimizing the distribution form of the pressure-equalizing groove, the influence of the pressure-equalizing groove on the aerostatic guide is revealed. It is found that the load capacity and static stiffness of the aerostatic guide can be greatly improved by using the pressure-equalizing groove, and the service accuracy and life of the bearing can be improved.
To solve the problems of low gas supply pressure and low load capacity of traditional orifice-compensated aerostatic journal bearings (OCAJBs), this paper takes advantage of the advantages of pressure-equalizing groove structures, connects them with orifices to form a micro-groove-orifice (MGO) structure, and designs a double-row gas supply micro-groove-orifice aerostatic journal bearing (MGOAJB). By establishing new governing equations and introducing the SST
Structural design of the MGOAJB
Figure 1(a) shows the structure diagram of the MGOAJB. The bearing adopts a double-row gas supply, and each row has eight orifices with equal spacing along the circumference direction.

Schematic diagram of the structure dimensions of the MGOAJB and OCAJB: (a) structure diagram of the MGOAJB and (b) structure diagram of the OCAJB.
where
To reflect the influence of the MGO structure on the static characteristics of aerostatic journal bearings under a high gas supply pressure, this paper takes the orifice-compensated aerostatic journal bearing (OCAJB) as a comparison reference, and its structure is shown in Figure 1(b). To ensure that the bearing always has the characteristics of orifice compensation, without cylindrical surface compensation (the load capacity and stiffness of cylindrical surface compensation are lower than orifice compensation),
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a cylindrical stingy cavity is arranged at the outlet of the orifice to ensure that the restrictive section is always the orifice cross-section, where
The structural dimension parameters of the MGOAJB and OCAJB are shown in Table 1.
Structural dimension parameters of the MGOAJB and OCAJB.
Theoretical model and simulation of the static characteristics of the MGOAJB under a high gas supply pressure
Theoretical calculation
Gas flow
The gas flow through a single orifice 8 is
where
When the gas passes through a single pressure-equalizing groove, the gas flow 2 is
where
According to the lubrication theory proposed in Wang, 2 the existence of a pressure-equalizing groove is equivalent to the secondary compensation of an orifice, so the pressure behind the orifice is equal to the pressure when the gas enters the pressure-equalizing groove, that is,
The gas flow entering the gas film through the orifice or pressure-equalizing groove 2 is
where
According to the principle of conservation of mass, the following relations are obtained:
Substituting equations (1), (2), and (4) into equation (5), and using equation (3), the outlet pressure of the pressure-equalizing groove
Turbulence governing equations
When calculating the static characteristics of aerostatic bearings, the Reynolds equation is usually used as the theoretical model, the derivation process of the Reynolds equation is carried out under the condition that the Reynolds number is not too large (laminar flow), and the momentum equation in the governing equation can be simplified. 8 However, when the gas supply pressure increases, the Reynolds number at the gas film inlet increases significantly, making the gas flow more complex, and the inertia force term in the momentum equation cannot be ignored. Therefore, the Reynolds equation of classic lubrication theory is no longer applicable, 9 and the governing equation needs to be re-established for theoretical modeling under a high gas supply pressure.
To investigate the phenomenon that the Reynolds number in the gas film increases when the gas supply pressure increases, the Reynolds average N−S equation (RANS) method in the turbulence model is used to derive the theoretical model of the pressure distribution in the gas film flow field. The tensor forms of its governing equations are as follows11,24:
Continuity equation:
Momentum equation:
Energy equation:
Gas state equation:
Ideal gas equation:
where
The term related to the turbulent pulsation value
where
Researchers have found that the turbulent viscosity in the SST
The turbulent viscosity
where
The transport equation of the turbulent kinetic energy
Transport equation of turbulent kinetic energy
Turbulence specific dissipation rate
where
Load capacity and stiffness
The source of the load capacity of an aerostatic journal bearing is the ability to support an external load caused by the difference in pressure distribution on the upper and lower surfaces of the bearing. 8 The load capacity is calculated as19,20:
The stiffness of the bearing is the ratio of the change in load capacity and the increment of eccentricity, that is,
where
Simulation calculation
Boundary conditions and meshing
According to the method and steps of CFD simulation calculation, as shown in Figure 2, the gas flow field model of the MGOAJB is established by taking the gas in the MGO (including the orifice and pressure-equalizing groove) and the gas in the gas film (the gap between the inner surface of the bearing and the spindle) as the research object. Before the high-pressure gas enters the orifice through the gas supply channel, the flow needs to be stabilized in a pressure-stabilizing chamber. Therefore, the inlet of the pressure-stabilizing chamber is usually set as the pressure inlet in the simulation calculation. 23 The outlet at both ends of the gas film is set as the pressure outlet and connected with the external atmosphere. Since the double-row gas supply structure adopted in this paper has symmetry in the axial direction, to simplify the calculation, the midpoint of the bearing axis is taken as the symmetry face, and half of the structure is taken for calculation. In this paper, SolidWorks software is used for modeling, and the x_t format is saved for output, which can completely retain the thickness characteristics of the gas film for subsequent mesh division.

Gas film flow field model and computational boundary.
This paper uses the mesh tool of the Workbench module in ANSYS 18.2 software to mesh the model of the gas film flow field. The gas film is very thin (μm as unit), which is quite different from other structure sizes (mm) in the model. In order to improve the accuracy and reflect the thickness characteristics of the gas film, this paper adopts the method of partition mesh division. First, the model shown in Figure 2 is divided into two parts: MGOs and gas film. Then, the MGO part is divided by the hex dominant method. The mesh size should not only ensure the accuracy of reflecting the shape characteristics of the MGO structure but also avoid unnecessary computational pressure due to the mesh density. Through trial and error, the body size of the MGO part is chosen to be 0.05 mm. The grid cell size of the gas film is of the same order of magnitude as that of the MGO as much as possible. In this paper, the gas film is divided into 750 and 2100 equal parts in the axial and circumferential directions by the sweep method and edge sizing commands, respectively. In the direction of the gas film thickness, to reduce the pressure on the computer hardware as much as possible under the condition of ensuring the calculation accuracy, the thickness is divided into five layers by the face meshing command, as shown in Figure 3 after the meshing is completed.

Computing grid of the gas film flow field.
Simulation calculation
Usually, the gas supply pressure of the aerostatic bearing is 0.4–0.6 MPa. Since this paper studies the static characteristics of the aerostatic journal bearing under a high gas supply pressure, referring to previous research11,12 and experimental equipment, this paper adopts 0.9, 1.1, 1.3, and 1.5 MPa as the gas supply pressure, which is connected with the pressure inlet of the gas film flow field model, and the pressure outlet is connected with the outside atmosphere. In this paper, the Fluent module in ANSYS is used to simulate the flow field. The SST

Flowchart of the simulation calculation.
Results and analysis
Influence of the MGO structure on the static characteristics
As shown in Figure 5, under a high gas supply pressure (

Load capacity and stiffness of the MGOAJB under a high gas supply pressure: (a)
As shown in Figure 5, under a high gas supply pressure (
As shown in Figure 6, to study the principle of the MGO structure to improve the load capacity of the aerostatic bearing, taking the gas supply pressure

3D cloud map and contour profile of the gas film pressure distribution of the aerostatic journal bearing (
As shown in Figure 7, with increasing gas supply pressure, the gas flow into the gas film of the aerostatic journal bearing shows an increasing trend, indicating that the gas flow increases with increasing gas supply pressure. Under the same gas supply pressure, the gas flow of the MGOAJB is lower than that of the OCAJB (3.94%–5.26%). Combined with the above conclusions, it can be concluded that the load capacity and stiffness of the MGOAJB are significantly higher than those of the OCAJB, and the gas flow of the MGOAJB is lower. Therefore, when the aerostatic journal bearing works for a long time, the MGO structure can save the high-pressure gas in the gas source device and offers better economy.

Gas flow of the MGOAJB under high supply pressure.
Influence of the number and position of MGO structures on static characteristics
As shown in Figure 8,

Schematic diagram of the different numbers and locations of MGO structures: (a)
As shown in Figure 9, under a high gas supply pressure (

Load capacity and stiffness of aerostatic bearings with different numbers and positions of MGO structures under a high gas supply pressure: (a)
As shown in Figure 10, when only one axial MGO structure is set in the eccentric direction of the spindle (

Contour profile of the gas film pressure distribution of the MGOAJB with different numbers and positions of MGO structures (
As shown in Figure 11, under a high gas supply pressure, different numbers of MGOs have a significant effect on the gas flow. For the axial MGO structure, the gas flow increases with additional axial pressure-equalizing grooves. When

Gas flow of the MGOAJBs with different numbers and positions of MGO structures under a high gas supply pressure.
Influence of the MGO layout direction on the static characteristics
To study the influence of the layout direction of the MGO on the static characteristics of the MGOAJB under a high gas supply pressure, four kinds of the MGOAJB are designed: an axial MGO, through-type circumferential MGO, segmented type circumferential MGO and oblique MGO. For convenience of expression, they are correspondingly expressed as Layout-I, Layout-II, Layout-III and Layout-IV, as shown in Figure 12. The four kinds of bearings are the same: double-row gas supply, bearing size, groove depth, groove width and groove section shape. The specific parameters are shown in Table 1. To avoid the influence of the number and position of MGOs on the results, for the axial MGO and oblique MGO, the number of MGO structures is

Structural schematic diagram of aerostatic journal bearings with different MGO layout directions: (a) layout-I (axial MGO), (b) layout-II (through-type circumferential MGO), (c) layout-III (segmented type circumferential MGO), and (d) layout-IV (oblique MGO).
As shown in Figure 13 and referring to the data in Figure 5, under a high gas supply pressure (

Load capacity and stiffness of MGOAJBs with different MGO layout directions under a high gas supply pressure: (a)
Under a high gas supply pressure, although the stiffness of Layout-II is increased by 38.71%–66.06%, 42.51%–58.36%, 34.91%–50.35%, and 18.13%–43.82% compared with the OCAJB case, it is significantly lower than that of the other three MGO layout structures. Compared with the Layout-I case, the Layout-III results are reduced by 15.21%–32.47%, 13.02%–30.50%, 9.70%–26.47%, and 9.86%–28.53%, respectively. The stiffness of Layout-IV is close to that of Layout-I but slightly lower (2.63%–14.09%, 3.41%–13.61%, 4.15%–11.62%, 4.31%–14.47%).
As shown in Figure 14, according to the principle of the pressure-equalizing effect of the MGO structure, Layout-I has a significant axial pressure equalization effect. According to the analysis in the previous section, by increasing the number of axial MGOs, the high-pressure area in the gas film can be expanded and connected along the circumferential direction, which makes up for the deficiency of a single axial MGO structure in increasing the gas film pressure, expands the range of high-pressure area in the gas film, and improves the load capacity of aerostatic journal bearings (Figure 14(a)). Layout-II connects the high-pressure gas in the eccentric direction of the spindle to the low-pressure area far from the eccentric direction through the pressure-equalizing groove and equalizes the gas film pressure in the whole circumferential direction so that the pressure difference between the upper and lower surfaces of the bearing becomes significantly smaller, reducing the load capacity and stiffness (Figure 14(b)). Layout-III is an improvement of Layout-II. The original through-type circumferential MGO is divided into two sections according to the different eccentric directions so that the upper and lower surfaces of the bearing are pressure-equalizing, and the loss of pressure difference is smaller, so it has higher load capacity and stiffness compared with Layout-II. However, for the double-row gas supply journal bearing in this study, Layout-III is unable to expand and connect the high-pressure area in the gas film along the axial direction effectively, and its effect on axial pressure equalization is limited (Figure 14(c)). As shown in Figure 14(d), although Layout-IV offers both axial and circumferential pressure equalization, the high-pressure area is asymmetric, resulting in uneven force on the upper and lower surfaces of the bearing and reduced load capacity.

Contour profile of the gas film pressure distribution of MGOAJBs with different MGO layout directions under a high gas supply pressure (
As shown in Figure 15, the layout direction of the MGO has a significant impact on the gas flow of the MGOAJB. The gas flow of Layout-II is the highest, 6.87–9.12% higher than that of the OCAJB. Although the load capacity and stiffness of Layout-IV are higher, the gas flow is close to that of Layout-II (1.81%–2.71%) and higher than that of the OCAJB (5.25%–6.11%), so the gas consumption of the gas source device is higher. The gas flows of Layout-I and Layout-III are similar (4.24%–4.84%) and lower than that of the OCAJB (3.94%–9.52%). Therefore, considering the influence of the four layout directions of the MGO on the load capacity, stiffness and gas flow of the MGOAJB, Layout-I (axial MGO) is more suitable for aerostatic journal bearings with a double-row gas supply, as it can not only improve the load capacity and stiffness of the MGOAJB but also reduce the gas consumption and has better economy.

Gas flow in different MGO layout directions under a high gas supply pressure.
Experimental verification
As shown in Figure 16, the aerostatic journal bearing test bench is mainly composed of an air compressor, gas cylinders, air filter, testing bearings, bearing supports, spindle, loading device, drive motor, displacement sensor, data collection device and computer. The testing bearing is distributed at both ends of the spindle, which is fixed on the test bench by the bearing supports and supports the spindle rotation. The drive motor is connected to the spindle through a flexible coupling to drive the spindle to rotate. The displacement sensor is installed on the support, the test data are transmitted to the data collection device, and the data are processed by the data processing software on the computer.

Aerostatic bearing test equipment: (a) schematic diagram of test bench and (b) test bench.
Under a high gas supply pressure, the radial load and displacement of the spindle are measured by the loading device and displacement sensor and drawn into a curve, namely, the load capacity curve of the aerostatic journal bearing, as shown in Figure 17. With the continuous increase in the gas supply pressure, the load capacity continues to increase. Under a high gas supply pressure, the load capacity of the MGOAJB is significantly higher than that of the OCAJB (33.7%–102.6%), and the larger the spindle eccentricity is, the more significant the difference. Comparison of the simulation calculations indicates that they are consistent with the variation trend of the experimental data. Although errors and assembly accuracy are unavoidable in the processing of testing bearings, resulting in certain differences between the experimental data and the simulation calculation, the results of the simulation calculation and experimental data are close to each other (5.8%–9.5%), indicating accurate calculation the load capacity of aerostatic journal bearings under high supply pressure; thus, the simulation method has high accuracy and reference value.

Comparison of simulation and experimental data under a high gas supply pressure: (a)
Conclusion
To solve the problems of a low gas supply pressure and low load capacity of the traditional OCAJB, this paper designs a double-row gas supply MGOAJB. By establishing new governing equations and introducing the SST
(1) Under a high gas supply pressure, the MGO structure can improve the pressure distribution of the gas film flow field and expand the range of the high-pressure area of the gas film, which makes the load capacity and stiffness of the MGOAJB significantly higher than those of the OCAJB. The MGO structure can reduce the gas consumption so that the MGOAJB has better economy.
(2) Under a high gas supply pressure, the position and number of MGO structures have a notable influence on the static characteristics of the MGOAJB. With additional MGO structures in the eccentric direction of the spindle, the load capacity and stiffness of the bearing increase substantially, but when the number of MGO structures away from the eccentric direction of the spindle increases, the load capacity and stiffness slightly decrease. The gas flow increases with additional MGO structures.
(3) Under a high gas supply pressure, the layout direction of MGO structures has a prominent influence on the static characteristics of the MGOAJB. Axial MGOs have a higher load capacity and stiffness and lower gas flow. Through-type circumferential MGOs have a lower load capacity and stiffness but higher gas flow. As an improvement, the segmented type circumferential MGO improves the load capacity and stiffness and reduces the gas flow to a certain extent. The load capacity and stiffness of the oblique MGO are close to those of the axial MGO, but the gas flow is higher than that of the axial MGO, and the gas consumption is higher.
