Multi-field coupled free vibration for a micro resonant pressure sensor

Abstract

The micro resonant pressure sensor is attractive because it outputs the frequency signals. As the dimensions of the sensor decreases, the effects of the van der Waals forces and the electrostatic forces on its dynamics performance should be considered. It is a multi-field coupled dynamics problem. Here, the dynamic equations of the micro resonant beam for the micro resonant pressure sensor under multi-field coupled situations are deduced. Using these equations, the effects of the van der Waals force or the electrostatic force on the natural frequencies of the micro resonant beam are investigated. The effects become more obvious under certain conditions. The results are useful to improve design about dynamics performance for the micro resonant pressure sensor.